Erectrochemistry System Co.,Ltd
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product
LineupGeneral
Developing,Etching,StrippingTreatmentPlatingProcess controllerSpecial analyzerEquipment
Developing
Alkali developer analyzer/controller  
Etching Strippng
Perfect controllers for Etchant
#9752CU.#9552NⅡ
Cupric Chloride Etchant (For hydrogen peroxide)
Concentration/Conductivity analyzers/controllers
#9752FE.#1033N2
Ferric Chloride Etchant
 
#9752CL03
Cupric Chloride Etchant (For sodium chlorate)
 
#1036FEH2
Ferric Chloride Etchant
 
Alkali etching
Alkali etchant automatic control system  
Developing
#1036D
Alkali Developer Analyzer/Controller
Overview
This device measures the concentrations of free alkali and dissolved resist in alkali developer, using titration, and outputs an automatic re-supply signal.
#1036D Alkali Developer Analyzer/Controller
Features
(1) Since no peristaltic pump is employed, it can be used without calibration.
(2) As it uses same method as manual analysis, this equipment qualifies as a standard analyzer.
(3) When free alkali drops below desirable levels, it outputs a re-supply signal. When dissolved resist concentration increases, it outputs a diluting signal.
(4) Handles the following developers: sodium carbonate, potassium hydroxide, sodium hydroxide, and TMAH.
Developing
#1036D2
Alkali Developer Analyzer/Controller
Overview
Improved, upgraded version of 1036D. This device measures free alkali concentration in alkali developer using titration, resist concentration in the alkali developer using photometry, and outputs an automatic re-supply signal.
#1036D2 Alkali Developer Analyzer/Controller
Features
(1) As it uses same methodology as manual analysis for measurement of free alkali concentration, this equipment qualifies as a standard analyzer.
(2) Dissolved resist is measured by photometry with a deuterium lamp and a special optical filter. This automatically controls resist with a one order of magnitude higher accuracy and one order lower variation. By measuring resist concentration, the timing of dilution can be precisely determined and the developer can be automatically diluted to maintain a constant concentration of the dissolving resist.
(3) When free alkali drops below desirable level, it outputs a re-supply signal. When the concentration of dissolving resist increases, it outputs a diluting signal.
(4) It handles the following developers: sodium carbonate, potassium hydroxide, sodium hydroxide, and TMAH.
ELECTROCHEMISTRY SYSTEMS CO., LTD
5-23-1 Shinbashi, Minato-Ku,
Tokyo, 105-0004 Japan
TEL : 81-(0)3-3431-7662 FAX : 81-(0)3-5405-7250