Erectrochemistry System Co.,Ltd
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1036D2
Alkaline Developer Analyzer/Controller
  Alkaline Developer Analyzer/Controller
We have developed an Alkaline Developer Analyzer/Controller that can precisely measure and control the concentration of dissolved resist. Since the measurement of effective alkali concentration uses the same methodology as manual analysis, this unit can be used as a standard analyzer. With this remarkably advanced developer control, alkali liquid developer control has entered a new era, reaching new levels of quality, yield and convenience.
   
9752
9752 Family of Etchant Perfect Controllers  
Three models have been developed to cater for the following etchants: cupric chloride (hydrogen peroxide regeneration system), cupric chloride (sodium chlorate regeneration system), and ferric chloride. We have pursued cost-effectiveness and user-friendliness by eliminating unnecessary features. Leading-edge technologies, such as employment of a newly designed maintenance-free sensor, titanium chassis, multi-CPU processing, etc. have been incorporated.
9752CLO3 9752FE
9752CU
Cupric chloride etchant For hydrogen peroxide regeneration.
9752CLO3
Cupric chloride etchant For sodium chlorate regeneration.
9752FE
For ferric chloride etchant.
 
ELECTROCHEMISTRY SYSTEMS CO., LTD
5-23-1 Shinbashi, Minato-Ku,
Tokyo, 105-0004 Japan
TEL : 81-(0)3-3431-7662 FAX : 81-(0)3-5405-7250