Stripping

Developing, Etching, Stripping

1036D Alkali Developer Analyzer/Controller

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Overview

This device measures the concentrations of free alkali and dissolved resist in alkali developer, using titration, and outputs an automatic re-supply signal.

1036D2 Alkali Developer Analyzer/Controller

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Overview

Improved, upgraded version of 1036D. This device measures free alkali concentration in alkali developer using titration, resist concentration in the alkali developer using photometry, and outputs an automatic re-supply signal.

936EC,873EC Equipment for alkaline developer solution preparation

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Overview

It uses the principle of electromagnetic induction to measure and control the concentration/conductivity of the solution. This low-cost controller can be used for automatic management of stripping solutions, contributing to quality improvement and cost reduction.