Stripping
Developing, Etching, Stripping
1036D Alkali Developer Analyzer/Controller
Overview
This device measures the concentrations of free alkali and dissolved resist in alkali developer, using titration, and outputs an automatic re-supply signal.
1036D2 Alkali Developer Analyzer/Controller
Overview
Improved, upgraded version of 1036D. This device measures free alkali concentration in alkali developer using titration, resist concentration in the alkali developer using photometry, and outputs an automatic re-supply signal.
936EC,873EC アルカリ現像液調合用
Overview
電磁誘導の原理で、溶液の濃度／電導度を測定管理します。剥離液の自動管理にローコストのこのコントローラが使用でき、品質向上とコストダウンに貢献します。